New Nanostructured Sensor Arrays for Hydride Detection
|Principal Investigator||Debra Deininger|
|Relevance to Implications||Some|
|Class of Nanomaterial||Generic|
|Broad Research Categories||
|Anticipated Total Funding||$99,998.00|
|Anticipated End Year||2007|
The goal of the proposed project is to develop improved sensors for the detection of hydrides (including arsine, phosphine, and diborane) for protection of worker health and safety. Current sensors suffer from severe limitations including lack of selectivity, and limited accuracy and lifetime. An electronic sensor system, capable of automatically warning workers of the presence of one of these toxic gases, would provide a substantial benefit for worker health and safety.
This project will take advantage of advances in nanotechnology, ceramic micromachining, and materials chemistry to create sensors that are substantially better than current state of the art. The improved sensors will be the basis for improved personal and permanent monitors for increased protection of workers in the semiconductor industry.