Nanotechnology Project

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Environment, Health and Safety Research

New Nanostructured Sensor Arrays for Hydride Detection

Project Information

Principal InvestigatorDebra Deininger
Project URLView
Relevance to ImplicationsSome
Class of NanomaterialGeneric
Impact SectorSafety
Broad Research Categories Safety
NNI identifier

Funding Information

Anticipated Total Funding$99,998.00
Annual Funding$99,998.00
Funding SourceNIOSH
Funding MechanismExtramural
Funding SectorGovernment
Start Year2006
Anticipated End Year2007


The goal of the proposed project is to develop improved sensors for the detection of hydrides (including arsine, phosphine, and diborane) for protection of worker health and safety. Current sensors suffer from severe limitations including lack of selectivity, and limited accuracy and lifetime. An electronic sensor system, capable of automatically warning workers of the presence of one of these toxic gases, would provide a substantial benefit for worker health and safety.

This project will take advantage of advances in nanotechnology, ceramic micromachining, and materials chemistry to create sensors that are substantially better than current state of the art. The improved sensors will be the basis for improved personal and permanent monitors for increased protection of workers in the semiconductor industry.