Nanotechnology Project

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Environment, Health and Safety Research

Engineering Research Center for Extreme Ultraviolet Science and Technology

Project Information

Principal InvestigatorJorge Rocca
InstitutionColorado State University
Project URLView
Relevance to ImplicationsSome
Class of NanomaterialEngineered Nanomaterials
Impact SectorCross-cutting
Broad Research Categories Characterization
NNI identifiera5-15

Funding Information

Anticipated Total Funding$18,206,041.00
Annual Funding$2,275,755.13
Funding SourceNSF
Funding Mechanism
Funding Sector
Start Year2003
Anticipated End Year2011


The Engineering Research Center for Extreme Ultraviolet Science and Technology at Colorado State University (CSU) in partnership with the University of Colorado (CU), the University of California, Berkeley, and the Center for X-Ray Optics, Lawrence Berkeley Laboratory. The P.I. and Center Director is Dr. Jorge Rocca, Professor of Electrical and Computer Engineering at CSU. The vision of the ERC is to inexpensively harness the extreme ultraviolet (EUV), soft x-ray range of electromagnetic radiation to image and measure small features, particularly in the metrology of VLSI masks and the microscopy of biological specimens. These functions currently are performed using synchrotron radiation sources. EUV wavelengths can image nanoscale features, making the deliverables of this ERC useful in manipulating and producing nanoscale objects. The ERC is based on a partnership with microelectronics firms and will prepare a diverse workforce of physicists and electrical engineers needed to advance and implement EUV and nanoscale science and technology